Concentration measurement
in the
Semiconductor industry
in the
Semiconductor industry
Concentration monitoring for semiconductor processes – for efficient production, stable processes and the highest quality.
Visit our free webinar on the topic Concentration measurement in the Semiconductor industry on May 20, 2026!
Up to ±0.02 wt%
Real-time measurement
Maintenance free
Cost saving
Challenges in measuring concentration in semiconductor processes
In semiconductor production, the exact ratio of chemical concentrations is crucial, but classic laboratory analyzes often provide results too late. With LiquiSonic® SensoTech enables reliable real-time monitoring that can be easily integrated into existing processes. The system delivers precise measurement data without maintenance, thereby increasing process reliability and efficiency.
challenges
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Chemical concentrations not in target range
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Time-consuming laboratory analyzes
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No immediate and reliable chemical composition information
Solution: LiquiSonic®
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Clear monitoring with LiquiSonic®
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Instant display of chemical concentration
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Seamless integration into existing systems
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Maintenance-free and no consumables
Your advantages
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Traceable and reliable measurement results
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Measurement results in real time
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Completely maintenance-free sensors and chemical-resistant materials
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Easy integration into systems of any size and configuration
Our solution: The LiquiSonic® Measuring system
Monitor concentration in real time
LiquiSonic® combines modern ultrasound technology with temperature-compensated measurement to deliver precise results for critical chemical mixtures in semiconductor manufacturing. Real-time monitoring ensures stable product quality, reduces deviations and provides data for process optimization. This reduces operating costs and chemical consumption, while process reliability and efficiency increase.
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Ensuring quality: Real-time monitoring guarantees precise results without deviations.
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Reduce costs: Optimized processes for maximum reliability and less Consumption.
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Increase efficiency: Higher product quality reduced operating costs.
Technical details and specifications
Ultrasonic measuring principle
The speed of sound in liquids is directly related to the concentration of dissolved substances. High-precision time measurements enable the concentration to be determined exactly.
Conductivity integration
In three-component systems, conductivity is used as a second physical parameter to clearly determine both concentrations.
Temperature compensation
Two PT1000 sensors integrated into the measuring cell ensure automatic temperature compensation and thus precise measured values under all conditions. By directly detecting the process temperature, the speed of sound is corrected in real time, improving stability and accuracy even in the event of fluctuations.
Economic benefit
Real-time concentration measurement increases Quality, efficiency and reliability, while at the same time Costs and resource consumption decrease:
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Reduced operating costs through lower chemical consumption and fewer laboratory analyses
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Less scrap and rework, as deviations can be identified and corrected immediately
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Stable product quality ensures competitiveness and reduces complaints
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More efficient processes through real-time data instead of time-delayed laboratory measurements
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Higher system availability thanks to maintenance-free sensors without consumables
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Process optimization through precise data leads to continuous improvement and better use of resources
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Fast ROI thanks to savings in energy and operating costs
Technical specifications
Measurement accuracy | Up to ±0.02 wt% |
Temperature range | 5°C to 60°C |
Print area | Up to 4 bar |
Material & coating | PFA |
Digital transmission | Up to 1,000 m (more on request) |
Interfaces | 4-20 mA, Profibus, Ethernet, Modbus, fieldbus, ... |
Protection class | IP65 |
calibration | One-time factory calibration |
maintenance | Completely maintenance-free |
Application examples
Typical chemical process steps and ours used for this Process solutions for cleaning and etching processes as well as special etching and development processes:
SC-1 (APM)
NH4OH/H2O2
SC-2 (HPM)
HCI/H2O2
SPM (Piranha)
H2SO4/H2O2
Oxide removal (DHF)
HF
Oxide removal (BOE/BHF)
HF/NH4F
Si₃N₄ etching
H3P.O4
Isotropic silicon etching
HF/ENT3
Anisotropic silicon etching (MEMS)
KOH/Si
TMAH/Si
Photoresist development
TMAH
Nitric acid / acetic acid
ENT3/CH3COOH
HF/HCl
HF/HCl
Success stories and references:
Detailed case studies and customer references are available from our sales team. Contact us for specific application examples from your industry.
The most important advantages at a glance
Constant quality
Real-time monitoring prevents deviations and ensures consistent product quality.
Cost savings
Less chemical consumption and lower operating costs through optimized processes.
Maximum efficiency
Real-time data enables faster decisions and optimized processes.
Maintenance free
Sensors are chemical resistant and require no consumables.
Frequently asked questions
SensoTech GmbH is a leading company in the field of process measurement technology based in Barleben, near Magdeburg, Germany. We develop and produce innovative solutions for monitoring and optimizing industrial processes. Our specialization lies in the precise measurement of concentrations, densities and other parameters in liquids - in real time and directly during the process.
Unlike optical methods, which are affected by color or haze, conductivity-based methods, which are sensitive to electrical conductivity, or density-based methods, which can be disturbed by temperature or gas bubbles, ours Ultrasound procedure independent of these influences.
The LiquiSonic® measuring technology also contains neither moving parts nor components that can wear out or be used up. After installation, the measuring system is therefore completely maintenance-free and drift-free.
The sensors offer digital signal transmission up to 1000 m and enable continuous inline measurement without sampling.
Our system uses ultrasonic transit time measurement to determine the speed of sound in liquids. This speed of sound correlates directly with the chemical concentration and allows Measuring accuracies of up to ±0.02 wt% for the semiconductor industry. The integrated temperature compensation ensures stable results even under fluctuating process conditions.
The system delivers results in real time. It Over 30 measurements are carried out per second. Based on these measurements you get a current measured value every second. This fast response time enables effective process control and early detection of deviations.
Our semiconductor sensors work reliably in one Temperature range from 5°C to 60°C and pressures up to 4 bar.
Yes, by combining sound speed measurement with additional physical quantities (e.g. conductivity). multiple components be determined simultaneously. This means that other additives in semiconductor production can also be monitored.
The semiconductor measuring system is completely maintenance-free. There are no mechanical wear parts, seals or optical windows that could be attacked. Regular calibration is not necessary - the LiquiSonic® sensors remain stable for years.
The system offers various digital interfaces (e.g. Profibus, Ethernet / IP, Foundation Fieldbus) as well as analog 4-20 mA outputs. The integration takes place easily via standardized protocols.
Since the speed of sound is influenced by temperature, our LiquiSonic® Sensors equipped with high-precision temperature sensors. This allows the influence of temperature on the measurement directly compensated become. It is therefore not necessary to integrate additional temperature sensors into the semiconductor process.
Related applications
Texture and etching baths
Material layers are specifically removed in etching baths to create the desired surface structures.
Circuit board cleaning
Cleaning removes organic residues, particles and oxides so that the conductor tracks can be processed reliably.
Pickling bath monitoring
Pickling baths dissolve oxides or impurities from metal surfaces and must be constantly maintained in the correct concentration range.
Green liquor monitoring
Green liquor is a highly alkaline by-product in paper production, the concentration of which must be monitored for stable subsequent processes.
Acid concentration measurement
The precise determination of concentrations in aggressive chemicals is crucial for reactions to proceed in a controlled and safe manner.
gas scrubber
In gas scrubbers or neutralization systems, pollutants are removed from exhaust air or liquids, which requires precise control of the chemicals used.